The Physics of Micro/Nano-Fabrication

The Physics of Micro/Nano-Fabrication

Author: Ivor Brodie

Publisher: Springer Science & Business Media

ISBN: 9781475767759

Category: Science

Page: 622

View: 982

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
The Physics of Micro/Nano-Fabrication
Language: en
Pages: 622

The Physics of Micro/Nano-Fabrication

Authors: Ivor Brodie, Julius J. Muray
Categories: Science
Type: BOOK - Published: 2013-06-29 - Publisher: Springer Science & Business Media

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
The Physics Of Micro/Nano-Fabrication
Language: en
Pages: 670

The Physics Of Micro/Nano-Fabrication

Authors: Brodie
Categories: Science
Type: BOOK - Published: 2009-10-01 - Publisher:

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